Product Information
Wafer with film
High-quality and high-value-added products are offered.
| Membrane type classification | Membrane type | Film formation method |
|---|---|---|
| Oxide | Th-SiO2 | Thermal |
| Low-Particle Th-SiO2 * | Thermal | |
| PE-SiO2 | PE-CVD | |
| PE-TEOS | PE-CVD | |
| LP-CVD TEOS | PE-CVD | |
| HDP | PE-CVD | |
| USG | PE-CVD | |
| PSG | CVD | |
| BPSG | CVD | |
| RTO | Anneal | |
| Doped on Doped Poly | LP-CVD | |
| Amorphous | PE-CVD | |
| Nitride | LP-CVD SIN | LP-CVD |
| PE-CVD SIN | PE-CVD | |
| Picture Resists |
I-Line | Coating |
| KrF | Coating | |
| ArF | Coating | |
| Low-K | BD | CVD |
| BDⅡX | CVD | |
| AURORA | CVD | |
| CORAL | CVD | |
| Metal | Ta, TaN | Spatter |
| Ti, TiN | Spatter | |
| W | Spatter CVD |
|
| Cr | Spatter | |
| Cu | Spatter, EP | |
| Al, Al - Cu, Al - Si | Spatter | |
| Pt | Spatter | |
| Ni | Spatter | |
| Ru | Spatter | |
| Pd | Spatter | |
| Au | Spatter | |
| Co | Spatter | |
| etc. | Spatter |
＊Other membrane types are also available in addition to the aforementioned types of membranes. Specification of the desired film thickness is necessary.
Low Particle Thermal Oxide Wafer
Shiseu 髯 · 辭 辭 辭 冶 冶 え え え え シ シ シ シ シ シ シ シ シ
Low Particle Thermal Oxide Wafer formed in a state-of-the-art oxidizing furnace that controls particles and metal contamination is proposed.
Atomic Layer Deposition
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Next Generation Gate Material
-
ALD High-K gate insulating film
Logic ... HfSiO, ZrSiO, etc
Memory ... HfO, ZrO, AlO, HfSiO, TiO, etc -
ALD metal electrode
Logic ... Ti, TiN, Ta, TaN, TiSiN, TaSiN, TaSiN, HfN, HfSiN, etc
Memory ... Ti, TiN, Ta, TaN, TiSiN, TaSiN, etc
＊Film types in addition to the aforementioned types are also available.
Ion Implantation Wafer
Pediatric surgery and treatment
- Ion species: B +, BF2 +, P +, As +, In +, etc.
- Dose: 1011 ~ 1015 ions / cm2
- Acceleration energy: 5Kev ~ 4.6Mev
- RTA processing