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MicroProf® X NUMX
MicroProf® 200 has become the most popular model with the largest number of shipments among FRT's measuring equipment. The measurement stage of XNUM X mm X X NUM X mm can cover many common measurement objects, and in addition, multiple parameters can be measured with X NUMX units in a multi sensor system.
As a feature of MicroProf® 200
- 1. Adopt measurement method conforming to DIN-ISO and SEMI standard
- 2. Improved maintainability by adopting LED light as light source
- 3. Measurement rate is ~ 4KHz
- 4. By adopting multi-sensor system, it corresponds to various kinds of measurement
- 5. The measurement area is XNUM X mm X X NUM X mm
- 6. Upgradeable to automation (MHU)
- 7. A variety of options line up
The CWL sensors installed above and below can measure the wafer thickness and TTV by a method that conforms to the SEMI standard by measuring the same points. Of course, simultaneously with thickness and TTV measurement, surface shape and roughness can be measured with the upper sensor.
MicroProf® 200 can be upgraded on-site after device installation. Fully automated measurement can be realized by installing wafer handling robot and loading stage to MicroProf® 200 of manual machine. It is possible to use it manually for development purposes at the time of introduction and use it as a measuring device for quality control at mass production line after development.
Thermo Unit option
In order to measure shape change and distortion due to the temperature of the measurement object, Thermo Unit is offered as an option in FRT. By controlling the temperature with a high precision of 80 ° C in the temperature range from -400 ° C to 0.05 ° C, it is possible to measure change due to heat of the object under stable temperature change. The Thermo Unit stocks several kinds again, and it can easily attach to the stage of the equipment.