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MicroProf® X NUMX
Although MicroProf® 100 is a small table top type measuring device, it adopts a multi sensor system that can mount 4 sensors. For that reason, not only the surface shape but also film thickness measurement etc. can be done with 1 units. In addition, it can also correspond to TTV measurement by upper and lower 2 sensors as options.
As a feature of MicroProf® 100
- 1. Compact and simple design of table top adopted
- 2. 3D Not only the surface shape measurement but also the film thickness measurement is possible (multi sensor system)
- 3. Measurement at the nano level
- 4. Optional for TTV measurement with up and down 2 sensors
- 5. Motor driven XY stage mounted
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Due to membrane stress
Wafer shape -
Hole pattern shape