Product Information

Wafer with film

Blanket Film wafers

High-quality and high-value-added products are offered.

Membrane type classification Membrane type Film formation method
Oxide Th-SiO2 Thermal
Low-Particle Th-SiO2 * Thermal
PE-SiO2 PE-CVD
PE-TEOS PE-CVD
LP-CVD TEOS PE-CVD
HDP PE-CVD
USG PE-CVD
PSG CVD
BPSG CVD
RTO Anneal
Silicon Doped on Doped Poly LP-CVD
Amorphous PE-CVD
Nitride LP-CVD SIN LP-CVD
PE-CVD SIN PE-CVD
Photo
Resists
I-Line Coating
KrF Coating
ArF Coating
Low-K BD CVD
BDⅡX CVD
AURORA CVD
CORAL CVD
Metal Ta, TaN Spatter
Ti, TiN Spatter
W Spatter
CVD
Cr Spatter
Cu Spatter, EP
Al, Al - Cu, Al - Si Spatter
Pt Spatter
Ni Spatter
Ru Spatter
Pd Spatter
Au Spatter
Co Spatter
etc. Spatter

*Other membrane types are also available in addition to the aforementioned types of membranes. Specification of the desired film thickness is necessary.

Low Particle Thermal Oxide Wafer
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Low Particle Thermal Oxide Wafer   Shimosu 髯 · 辭 辭 辭 辭 冶 え え え え え え シ シ シ シ シ シ

Low Particle Thermal Oxide Wafer formed in a state-of-the-art oxidizing furnace that controls particles and metal contamination is proposed.

Atomic Layer Deposition
Welcome

Atomic Layer Deposition   シ   LD 閹懶 シ

Next Generation Gate Material

  • ALD High-K gate insulating film
    Logic ... HfSiO, ZrSiO, etc
    Memory ... HfO, ZrO, AlO, HfSiO, TiO, etc
  • ALD metal electrode
    Logic ... Ti, TiN, Ta, TaN, TiSiN, TaSiN, TaSiN, HfN, HfSiN, etc
    Memory ... Ti, TiN, Ta, TaN, TiSiN, TaSiN, etc

*Film types in addition to the aforementioned types are also available.

Ion Implantation Wafer
Pediatric surgery and treatment

Ion Implantation Wafer (Introduction to Server / Server

  • Ion species: B +, BF2 +, P +, As +, In +, etc.
  • Dose: 1011 ~ 1015 ions / cm2
  • Acceleration energy: 5Kev ~ 4.6Mev
  • RTA processing

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